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Clean / Precision Air Conditioning / Local Air Conditioning

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Comparison of Cleanliness factor class

Comparison of Cleanliness factor class

 

Left side diagram represents the correlation table for Class of cleanliness factor of JIS standards and FED-STD standards.

POINT
<Class comparison>

209D ISO
100 Class 5
1,000 Class 6
10,000 Class 7
100,000 Class 8

POINT

In Class 100, the numbers of floating particles of size 0.5μm dia are 100 in a space of 1 cubic feet. On converting them to a space of 1 cubic meter, the number of floating particles rises to 3500 as the 1 cubic meter is 35 times of 1 cubic feet. As Class 100 is equivalent to ISO Class 5, the number of floating particles of size 0.5μm dia in case of ISO Class 5 are 3,500.

 

  ISO14644-1 JIS-B9920 FED-STD-209E
Measurement target Clean room or space with controlled environment Clean room as well as related controlled environment Clean room
Measurement target particle size

Measurement target particle size Single particle dia in the range of 0.1~5μm or multiple diameters

U notation is used for value below 0.1μm, and M notation is used for value 5μm

Standard range is 0.5~5μm

Class specific

Change is measurement particle size Number of measurements S0.5 ●
S is ●
Surface area of space in measurement

Minimum 6 points

Measurement point at 3 m along all sides

Targeted measurement points (20~30)

with minimum 2 points for
turbulent flow and laminar flow
S/2.32…………equation (1) Sx64/ (10M) 0.5…equation (2)
Equation (1) in case of turbulent flow
In case of laminar flow
Both equations applicable. Smaller value to be considered.
Minimum sampling
Air volume
2ℓ, 1 part or air volume of max 3ℓ comprising of 20 floating particles Air volume comprising of 20 floating particles.

 

 
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