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Product lineupClean fan filter unit

PAU Series

Model   Processed air volume
(m3/min)*
Dust collection efficiency  
PAU-01FFU About 0.8/0.9 or more 99.97% or more for 0.3 μm particles Product details
PAU-03FFU About 2.8/3.0 or more 99.97% or more for 0.3 μm particles Product details
PAU-05FFU About 4.8/5.0 or more 99.97% or more for 0.3 µm particles Product details
PAU-05FFU-DM About 4.8/5.0 or more 99.97% or more for 0.3 μm particles Product details
PAU-A11FFU 11 or more 99.97% or more for 0.3 μm particles Product details
PAU-A14FFU 14 or more 99.97% or more for 0.3 μm particles Product details
PAU-A17FFU 17 or more 99.97% or more for 0.3 μm particles Product details
PAU-A11FFU-ULPA 9 or more 99.999% or more for 0.1 μm particles Product details
PAU-A14FFU-ULPA 12 or more 99.999% or more for 0.1 μm particles Product details
PAU-A17FFU-ULPA 14 or more 99.999% or more for 0.1 μm particles Product details

* Average value with no load.

Features of clean fan filter unit

PAU series TECHNOLOGY

Clean fan filter unit

Supplies clean air with a HEPA filter

Clean air is supplied by the fan filter unit built into the HEPA filter.

Supplies clean air with a HEPA filter

Comprehensive range of functions to maintain the cleanliness level

Newly developed wind speed sensor with heated wire resistor

Prevents the ventilation frequency from dropping

Equipped with a newly developed wind speed sensor with heated wire resistor. The sensor detects the wind speed loss due to clogging of the filter to prevent the ventilation frequency from dropping following a drop in the wind speed.

Newly developed wind speed sensor with heated wire resistor

Clogging diagnosis function

Prevents a drop in the wind speed caused by clogging of the filter

When the wind speed drops due to clogging of the filter etc., an alarm will be lit automatically and an external warning can also be output. A variable trimmer to set the threshold for the wind speed level is also fitted as a standard option.

Clogging diagnosis function

Variable wind speed control function (05FFU)

Allows the wind speed to be raised when it drops

The air flow of the ventilation fan motor built into the fan filter unit can be adjusted by varying the volume. Fine adjustments can be made to the air flow or the air flow can be increased when it drops due to a pressure loss.

Variable wind speed control function (05FFU)

Outstanding maintainability of the filter

Quick top maintenance type with a one touch lock (01FFU - 05FFU)

Easy replacement with the need for tools

A one touch lock is employed to allow the HEPA filter to be replaced easily. HEPA filter can be removed and replaced without the need for tools.

Quick top maintenance type with a one touch lock

Side suction (11FFU~17FFU)

Minimizes the clearance with the ceiling

By taking in outside air from the side of the fan filter unit, it is possible to keep the clearance with the ceiling to a minimum. This is useful when the ceiling of the clean booth installation location is low, or when the height and dimensions of the clean booth body are large.

Side suction

Bottom maintenance type (05FFU-DM、A11FFU~A17FFU)

Maintenance at a height can be avoided

HEPA filter can be replaced from inside the booth. Maintenance at a height can be avoided.

Bottom maintenance type

A clean environment can be constructed easily

The temperature and humidity can also be controlled by combining it with a precision air conditioner

A clean environment can be built easily by combining the precision air conditioner with a fan filter unit. By passing the precision air produced by the PAU unit through the HEPA filter, clean air with a high level of cleanliness can be supplied locally. Moreover, “temperature and humidity control” and an “optimal clean environment” can be achieved easily as you can select a clean unit according to the volume of the target space and the level of cleanliness required.

A clean environment can be constructed easily

Type of filter

  High-performance filter HEPA filter ULPA filter
Operating cleanliness level Class 10~200,000 Class 100~10,000 Class 1~10
Example of use General office etc. IC post-process, liquid crystal process etc. IC pre-process etc.
Capacity Higher capturing capacity than a coarse dust filter 99.97% of 0.3 μm particles
Possesses the capacity to capture
99.99% of 0.1 μm particle
Possesses the capacity to capture

Compatible with ULPA specifications too

Class of filter can also be raised to an ultra-high performance filter (ULPA). *Check the delivery lead time.

HEPA filter

Standards for cleanliness level

Class 100 1,000 10,000 100,000
Ventilation frequency 250~400 times 150 times 75 times 20 times
Number of particles 3,530/m3 35,300/m3 353,000/m3 3,530,000/m3
100/ft3 1,000/ft3 10,000/ft3 100,000/ft3
Wind speed 0.2~0.4m/s 0.1~0.2m/s 0.05~0.07m/s 0.05~0.04m/s