Sputtering equipment cooling water temperature control
When the existing chiller broke down, they upgraded to the PCU-NE series HFC alternative chiller. The application was to control the temperature of the cooling water for a sputtering device. The sputtering device would shut down in an emergency if the cooling water temperature became too high, which would result in a large loss when producing expensive workpieces. The high control stability, flow rate, head, and other product specifications of HFC alternative chiller were highly rated, leading to their decision to adopt it.
Chillers
チラーとは一定温度にコントロールした水を循環することで、熱源を冷却または温調する装置です。産業機械、医療機械、理化学機器、食品機械など、さまざまな用途に使用されます。Chiller、チラーユニット、ユニットクーラー、冷却水循環装置と呼ばれることもありますが同義です。
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