Overview/Features
A clean environment can be easily created.
Clean Fan filter unit
PAU series
Clean fan filter unit
Supplies clean air with a HEPA filter
Clean air is supplied by the fan filter unit built into the HEPA filter.
Comprehensive range of functions to maintain the cleanliness level
Newly developed wind speed sensor with heated wire resistor
Prevents the ventilation frequency from dropping
Equipped with a newly developed wind speed sensor with heated wire resistor. The sensor detects the wind speed loss due to clogging of the filter to prevent the ventilation frequency from dropping following a drop in the wind speed.
Clogging diagnosis function
Prevents a drop in the wind speed caused by clogging of the filter
When the wind speed drops due to clogging of the filter etc., an alarm will be lit automatically and an external warning can also be output. A variable trimmer to set the threshold for the wind speed level is also fitted as a standard option.
Variable wind speed control function （05FFU）
Allows the wind speed to be raised when it drops
The air flow of the ventilation fan motor built into the fan filter unit can be adjusted by varying the volume. Fine adjustments can be made to the air flow or the air flow can be increased when it drops due to a pressure loss.
Outstanding maintainability of the filter
Quick top maintenance type with a one touch lock (01FFU - 05FFU)
Easy replacement with the need for tools
A one touch lock is employed to allow the HEPA filter to be replaced easily. HEPA filter can be removed and replaced without the need for tools.
Side suction （A11FFU～A17FFU）
Minimizes the clearance with the ceiling
By taking in outside air from the side of the fan filter unit, it is possible to keep the clearance with the ceiling to a minimum. This is useful when the ceiling of the clean booth installation location is low, or when the height and dimensions of the clean booth body are large.
Bottom maintenance type （A11FFU～A17FFU）
Maintenance at a height can be avoided
HEPA filter can be replaced from inside the booth. Maintenance at a height can be avoided.
A clean environment can be constructed easily
The temperature and humidity can also be controlled by combining it with a precision air conditioner (TCU/ECU)
A clean environment can be built easily by combining the precision air conditioner (TCU/ECU) with a fan filter unit. By passing the precision air produced by the PAU unit through the HEPA filter, clean air with a high level of cleanliness can be supplied locally. Moreover, “temperature and humidity control” and an “optimal clean environment” can be achieved easily as you can select a clean unit according to the volume of the target space and the level of cleanliness required.
filter Types
| High-performance filter | HEPA filter | ULPA filter | |
|---|---|---|---|
| Operating cleanliness level | Class 10～200,000 | Class 100～10,000 | Class 1～10 |
| Example of use | General office etc. | IC post-process, liquid crystal process etc. | IC pre-process etc. |
| Capacity | Higher capturing capacity than a coarse dust filter | 99.97% of 0.3 μm particles
Possesses the capacity to capture |
99.99% of 0.1 μm particle
Possesses the capacity to capture |
Compatible with ULPA specifications too
Class of filter can also be raised to an ultra-high performance filter (ULPA). *Check the delivery lead time.
Standards for cleanliness level
| Class | 100 | 1,000 | 10,000 | 100,000 |
|---|---|---|---|---|
| Ventilation frequency | 250～400 times | 150 times | 75 times | 20 times |
| Number of particles | 3,530/m3 | 35,300/m3 | 353,000/m3 | 3,530,000/m3 |
| 100/ft3 | 1,000/ft3 | 10,000/ft3 | 100,000/ft3 | |
| Wind speed | 0.2～0.4m/s | 0.1～0.2m/s | 0.05～0.07m/s | 0.05～0.04m/s |
Clean fan filter unit
| Model | Processing air volume (m 3 /min)※ |
Dust collection efficiency | ||
|---|---|---|---|---|
| PAU-01FFU | Approximately 0.8/0.9 or more | 99.97% or more for 0.3µm particles |
Product Catalog - Instruction manual |
|
| PAU-03FFU | Approximately 2.8/3.0 or more | 99.97% or more for 0.3µm particles |
Product Catalog - Instruction manual |
|
| PAU-05FFU | Approximately 4.8/5.0 or above | 99.97% or more for 0.3µm particles |
Product Catalog - Instruction manual |
|
| PAU-A11FFU | About 11 or more | 99.97% or more for 0.3µm particles |
Product Catalog - Instruction manual |
|
| PAU-A14FFU | Approximately 14 or more | 99.97% or more for 0.3µm particles |
Product Catalog - Instruction manual |
|
| PAU-A17FFU | Approximately 17 or more | 99.97% or more for 0.3µm particles |
Product Catalog - Instruction manual |
|
| PAU-A11FFU-ULPA | About 9 or more | 99.999% or more for 0.1µm particles |
Product Catalog - Instruction manual |
|
| PAU-A14FFU-ULPA | About 12 or more | 99.999% or more for 0.1µm particles |
Product Catalog - Instruction manual |
|
| PAU-A17FFU-ULPA | Approximately 14 or more | 99.999% or more for 0.1µm particles |
Product Catalog - Instruction manual |
*Average value when no load is applied
Related information
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