Exposure equipment
In exposure equipment, it is necessary to supply cool air and stabilize the temperature to prevent the expansion and contraction of photomasks.The PAU series precision air conditioner (TCU/ECU) can provide air with the required temperature, humidity, and cleanliness.
- Merchandise:
- Precision air conditioner (TCU/ECU)
- Industry:
- Electrical & Precision Inst. / Electronic Components & Semiconductors
- Process:
- Machining / Processing
Precision air conditioners
Precision air conditioner (TCU/ECU) are air conditioners that offer advanced temperature and humidity control, and are used in research facilities, clean rooms, and factories handling precision equipment. Compared to typical office and home air conditioners, precision air conditioner (TCU/ECU) are characterized by their higher stability in temperature and humidity control and their ability to provide localized air conditioning where needed.
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