Spin Coater
If temperature and humidity are not controlled, the viscosity of the coating fluid will fluctuate, which will change the diffusion speed and adhesion, resulting in uneven film thickness. It is necessary to keep the ambient temperature and humidity constant and prevent changes in the viscosity of the coating fluid. Controlling temperature and humidity with the PAU series precision air conditioner (TCU/ECU) will lead to improved yields.
- 商品：
- Precision air conditioner (TCU/ECU)
- 業界：
- 全業界
- 工程：
- Coating / Painting
Precision air conditioners
精密空調機とは、研究施設、クリーンルーム、精密機器を扱う工場などで使用される、高度な温度・湿度管理が可能な空調機のことです。精密空調機は一般的なオフィスや家庭用のエアコン・空調機と比べて、温度や湿度の精度が高く、局所的に必要な箇所を空調できるのが特徴です。
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