PAU-FFU/BS SERIES/Clean Equipment

Clean Fan Filter Unit

Clean Fan Filter Unit

Supplying clean air with the HEPA filter

The HEPA filter's internal fan filter unit supplies cleaned air.

Supplying clean air with the HEPA filter

Plenty of cleanliness-maintaining functions

Newly-developed Heat ray resistant wind sensor
Newly-developed Heat ray resistant wind sensor

Prevents decreases in ventilation frequency

Loaded with a newly-developed heat ray resistant wind sensor. Wind pressure drop due to clogging of the filter is detected, which makes it possible to prevent the loss of ventilation as a result of the wind speed decrease.

Clogging diagnostic function
Clogging diagnostic function

Preventing wind speed decrease caused by clogging of the filter

When wind speed decrease caused by clogging of the filter occurs, the alarm automatically lights up, and also alert output to the outside is possible. For any speed level an adjustable trimmer setting the threshold is also standardly equipped.

Variable wind control function (05FFU)
Variable wind control function (05FFU)

Increasing airflow is possible when airflow decreases

The airflow of the blower fan motor built into the fan filter unit can be changed/adjusted depending on the volume. When fine-tuning the airflow or when the air volume is reduced due to pressure loss, it is possible to increase the airflow.

Excellent filter maintainability

One-touch locked quick top-maintenance system (01FFU~05FFU)
One-touch locked quick top-maintenance system

Easily changed without the use of any tools

HEPA filters are easily changed with the one-touch lock implemented. HEPA filters can be removed and changed without the use of any tools.

Side Inlet (11FFU~17FFU)
Side Inlet

Minimizing ceiling clearance

It is possible to minimize the ceiling clearance by performing the air inletting from the side of the fan filter unit. This is useful in case the clean booth installation location has a low ceiling or the clean booth body height and specifications are big.

Bottom-maintenance system (05FFU-DM, A11FFU~A17FFU)
Bottom-maintenance system

Avoid maintenance in high places

The changing of the HEPA filter can be performed from within the booth. Maintenance at high locations can be avoided.

A clean environment can be created easily
A clean environment can be created easily

By combining with precision air conditioning equipment, temperature/humidity control is also possible

A clean environment can be created easily through combination of precision air conditioning equipment and a fan filter unit. By driving the precision air made with the PAU unit through the HEPA filter, clean air with high purity is achieved, and it is possible to supply clean air to local areas. Furthermore, the clean unit can freely be selected depending on the target space volume and the required level of cleanliness, which makes "humidity control" and "clean environment creation" easy.

Filter types

HEPA filter
Mid-/High-function filter HEPA filter ULPA filter
Filtering Capacity Class 10,000~20,000 Class 100~10,000 Class 1~10
Examples General office, etc. After IC Process Pre IC Process
Capabilities High trapping capacity coming from the dust filter Possesses the capacity to trap 99.97%
of all 0.3μm particles
Possesses the capacity to trap 99.99%
of all 0.1μm particles

Also compatible with ULPA specifications

It is possible to increase the class to Ultra-High Performance Filters (ULPA). *Please inquire regarding the delivery period.

Cleanliness standards

Class 100 1,000 10,000 100,000
Ventilation frequency 250~400 times 150 times 75 times 20 times
Total Particles 3,530/m3 35,300/m3 353,000/m3 3,530,000/m3
100/ft3 1,000/ft3 10,000/ft3 100,000/ft3
Wind speed 0.2~0.4m/s 0.1~0.2m/s 0.05~0.07m/s 0.05~0.04m/s
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