Clean Fan Filter Unit
Supplying clean air with the HEPA filter
The HEPA filter's internal fan filter unit supplies cleaned air.
Plenty of cleanliness-maintaining functions
Newly-developed Heat ray resistant wind sensor
Prevents decreases in ventilation frequency
Loaded with a newly-developed heat ray resistant wind sensor. Wind pressure drop due to clogging of the filter is detected, which makes it possible to prevent the loss of ventilation as a result of the wind speed decrease.
Clogging diagnostic function
Preventing wind speed decrease caused by clogging of the filter
When wind speed decrease caused by clogging of the filter occurs, the alarm automatically lights up, and also alert output to the outside is possible. For any speed level an adjustable trimmer setting the threshold is also standardly equipped.
Variable wind control function (05FFU)
Increasing airflow is possible when airflow decreases
The airflow of the blower fan motor built into the fan filter unit can be changed/adjusted depending on the volume. When fine-tuning the airflow or when the air volume is reduced due to pressure loss, it is possible to increase the airflow.
Excellent filter maintainability
One-touch locked quick top-maintenance system (01FFU~05FFU)
Easily changed without the use of any tools
HEPA filters are easily changed with the one-touch lock implemented. HEPA filters can be removed and changed without the use of any tools.
Side Inlet (11FFU~17FFU)
Minimizing ceiling clearance
It is possible to minimize the ceiling clearance by performing the air inletting from the side of the fan filter unit. This is useful in case the clean booth installation location has a low ceiling or the clean booth body height and specifications are big.
Bottom-maintenance system (05FFU-DM, A11FFU~A17FFU)
Avoid maintenance in high places
The changing of the HEPA filter can be performed from within the booth. Maintenance at high locations can be avoided.
A clean environment can be created easily
By combining with precision air conditioning equipment, temperature/humidity control is also possible
A clean environment can be created easily through combination of precision air conditioning equipment and a fan filter unit. By driving the precision air made with the PAU unit through the HEPA filter, clean air with high purity is achieved, and it is possible to supply clean air to local areas. Furthermore, the clean unit can freely be selected depending on the target space volume and the required level of cleanliness, which makes "humidity control" and "clean environment creation" easy.
|Mid-/High-function filter||HEPA filter||ULPA filter|
|Filtering Capacity||Class 10,000~20,000||Class 100~10,000||Class 1~10|
|Examples||General office, etc.||After IC Process||Pre IC Process|
|Capabilities||High trapping capacity coming from the dust filter||Possesses the capacity to trap 99.97%
of all 0.3μm particles
|Possesses the capacity to trap 99.99%
of all 0.1μm particles
Also compatible with ULPA specifications
It is possible to increase the class to Ultra-High Performance Filters (ULPA). *Please inquire regarding the delivery period.
|Ventilation frequency||250~400 times||150 times||75 times||20 times|