Model list
Clean fan filter unit
| Model | Processing air volume (m 3 /min)※ |
Dust collection efficiency | Catalog | Manuals | specification | |
|---|---|---|---|---|---|---|
| PAU-01FFU | Approximately 0.8/0.9 or more | 99.97% or more for 0.3µm particles |  |
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| PAU-03FFU | Approximately 2.8/3.0 or more | 99.97% or more for 0.3µm particles | |
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| PAU-05FFU | Approximately 4.8/5.0 or above | 99.97% or more for 0.3µm particles | |
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| PAU-A11FFU | About 11 or more | 99.97% or more for 0.3µm particles | |
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| PAU-A14FFU | Approximately 14 or more | 99.97% or more for 0.3µm particles | |
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| PAU-A17FFU | Approximately 17 or more | 99.97% or more for 0.3µm particles | |
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| PAU-A11FFU-ULPA | About 9 or more | 99.999% or more for 0.1µm particles | |
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| PAU-A14FFU-ULPA | About 12 or more | 99.999% or more for 0.1µm particles | |
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| PAU-A17FFU-ULPA | Approximately 14 or more | 99.999% or more for 0.1µm particles | |
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*Average value when no load is applied
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